Subramanian, B. and Prabakaran, K. and Jayachandran, M. (2012) Influence of nitrogen flow rates on materials properties of CrNx films grown by reactive magnetron sputtering. Bulletin of Materials Science, 35 (4). pp. 505-511. ISSN 0250-4707

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Abstract

Chromium nitride (CrN) hard thin films were deposited on different substrates by reactive direct current (d.c.) magnetron sputtering with different nitrogen flow rates. The X-ray diffraction patterns showed mixed Cr2N and CrN phases. The variations in structural parameters are discussed. The grain size increased with increasing nitrogen flow rates. Scanning electron microscopy image showed columnar and dense microstructure with varying nitrogen flow rates. An elemental analysis of the samples was realized by means of energy dispersive spectroscopy. The electrical studies indicated the semiconducting behaviour of the films at the nitrogen flow rate of 15 sccm

Item Type:	Article
Uncontrolled Keywords:	magnetron sputtering; think film
Subjects:	Electrochemical Materials Science
Divisions:	UNSPECIFIED
Depositing User:	Dr. N Meyyappan
Date Deposited:	02 Jan 2015 06:18
Last Modified:	02 Jan 2015 06:18
URI:	http://cecri.csircentral.net/id/eprint/3111

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